Thin Film Deposition

  • Coating for energy-efficient windows

  • Sputtering and Pulsed sputtering

  • Filter Cathodic Arc Deposition

  • Diamond-like carbon

 

Metal Plasma Immersion Ion

Implantation and Deposition (MePIIID)

 

Vacuum Arc Research

  • Cohesive Energy Rule

  • Ion Charge State Distribution

  • Ion Velocities

  • Ion Erosion Rate

  • Macroparticles

  • Fractal Model

Vacuum Arc Ion Sources

  • "MEVVA" Ion Source Development

  • Metal Ion Implantation

  • Fundamental Studies of Vacuum Arc

Gas Plasma Sources